Force Sensor Mounted on the NanoBot® Deflecting an AFM Cantilever in an SEM

Xidex Corporation (www.xidex.com) manufactures and sells the NanoBot, an easy-to-use, highly versatile, user-programmable nanomanipulator built for use inside scanning electron microscopes (SEMs) and focused ion beam (FIB) tools. The NanoBot’s LabVIEW based software can call-out user-made applications (Actions™) and integrate them with the NanoBot’s built in functionality. A force sensor attached to the NanoBot’s positioning arm operates as load cell for measuring forces with nanoNewton resolution. In the example shown here, the NanoBot deflects an AFM cantilever mounted in an SEM while a LabVIEW application displays the applied force in both the time domain and the frequency domain. Force sensors with different load ranges are available for use with the NanoBot.
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